炭化ケイ素(SiC)薄膜の光学特性とパッシベーション特性
Silicon Carbide (SiC) has rapidly emerged as an ideal material for monolithically integrated photonics applications, due to its combination of high refractive index, wide bandgap, low thermal expansion coefficient, and excellent rigidity properties. SiC is also an excellent material choice for making mirrors in astronomical telescopes. Ellipsometric results illustrate that transmittance and refractive index of SiC films increase with increasing deposition temperature due to variations in roughness layer thickness. Refractive index Silicon carbide is an extremely useful material, for several reasons. With a Mohs hardness rating of 9, it offers incredible durability – making it perfect for grinding wheels. Furthermore, its exceptional fracture characteristics and resistance to chemical reactions makes […]
炭化ケイ素(SiC)薄膜の光学特性とパッシベーション特性 続きを読む "